Optical measurement of characteristics of thin films using a spiral zone plate

In this work we propose a method for measuring physical characteristics of thin samples (thin films), including thickness, refractive index and tilt by moving the observation plane. The measurements are made utilizing a vortex spiral zone plate, which forms three intensity maxima that rotate when mo...

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Bibliographic Details
Published inKompʹûternaâ optika Vol. 49; no. 1; pp. 21 - 29
Main Authors Nalimov, A.G., Kozlova, E.S., Stafeev, S.S., Kotlyar, V.V., Podlipnov, V.V.
Format Journal Article
LanguageEnglish
Published Samara National Research University 01.02.2025
Subjects
shift sensor
spiral zone plate
thickness sensor
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Summary:In this work we propose a method for measuring physical characteristics of thin samples (thin films), including thickness, refractive index and tilt by moving the observation plane. The measurements are made utilizing a vortex spiral zone plate, which forms three intensity maxima that rotate when moving along optical axis. The error in measuring the tilt of a sample is a fraction of a degree, and the error in measuring its thickness is less than 5 nm. By the numerical simulation, three intensity maxima are shown to be formed after a metalens, rotating in space with an angular velocity of 136°/μm, which is almost twice as high as was reported in similar works.
ISSN:0134-2452
2412-6179
DOI:10.18287/2412-6179-CO-1493