Solid-state seeded nano-second pulse CO2 oscillator for extreme ultraviolet lithography

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Bibliographic Details
Published inPhotonics letters of Poland Vol. 5; no. 3
Main Author Nowak, Krzysztof M
Format Journal Article
LanguageEnglish
Published 01.01.2013
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ISSN:2080-2242
2080-2242
DOI:10.4302/plp.2013.3.06