Study on the Influence of pH on MRR Based on Acidic Slurry in CMP of 304 Stainless Steel
The ultra-thin 304 stainless steel sheet will be used in flexible displays for substrate material. In chemical mechanical polishing of ultra-thin stainless steel, the pH value of polishing slurry has an important influence on the material removal rate (MRR). In this paper, the influences of pH regul...
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Published in | Advanced Materials Research Vol. 1136; pp. 327 - 332 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Zurich
Trans Tech Publications Ltd
01.01.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The ultra-thin 304 stainless steel sheet will be used in flexible displays for substrate material. In chemical mechanical polishing of ultra-thin stainless steel, the pH value of polishing slurry has an important influence on the material removal rate (MRR). In this paper, the influences of pH regulator in slurry on MRR had been studied in CMP of ultra-thin 304 stainless steel based on alumina (Al2O3) abrasive in acidic polishing slurry. The research results show that, in the same conditions, different pH value had a different chemical action mechanism and a different MRR. And also, different oxidant with pH regulator had a different chemical action mechanism and a different MRR. The research results can provide the reference for studying the slurry in CMP of ultra-thin stainless steel. |
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Bibliography: | Selected, peer reviewed papers from the 18th International Symposium on Advances in Abrasive Technology (ISAAT 2015), October 4-7, 2015, Juju Island, Korea ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISBN: | 3038356514 9783038356516 |
ISSN: | 1022-6680 1662-8985 1662-8985 |
DOI: | 10.4028/www.scientific.net/AMR.1136.327 |