Optical axis alignment for three-aspherical mirrors system using five parallel laser beams and moiré method

• Published in: International journal of precision engineering and manufacturing Vol. 14; no. 3; pp. 381 - 386
• Main Author: Chen, Der-Chin
• Format: Journal Article
• Language: English
• Published: Springer Korean Society for Precision Engineering 01.03.2013
• Subjects: Engineering; Industrial and Production Engineering; Materials Science; Aspherical mirror; Effective focal length; Alignment
• DOI: 10.1007/s12541-013-0053-7
• ISSN: 2234-7593

In this paper, a new optical technique involving the five parallel laser beams alignment device and moiré method was developed to rapidly and accurately align the optical axis of three-aspherical mirrors system (TAMS). In this method, the optical axis of a first aspherical mirror is made parallel to the “five incident parallel laser beams” in the plane of incidence. The height and orientation of the first aspherical mirror are fine tuned and the alignment is assured by examining the direction of these five reflected laser beams. The optical axes of second and third aspherical mirror are aligned by five parallel laser beams in accordance with the configuration parameter of optical system in sequence. The effective focal length (EFL) of the TAMS was measured by moiré method and image formula. This novel method is used to align the optical axis of TAMS and the EFL deviation estimated has an accuracy of 1%.