Optical axis alignment for three-aspherical mirrors system using five parallel laser beams and moiré method

In this paper, a new optical technique involving the five parallel laser beams alignment device and moiré method was developed to rapidly and accurately align the optical axis of three-aspherical mirrors system (TAMS). In this method, the optical axis of a first aspherical mirror is made parallel to...

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Bibliographic Details
Published inInternational journal of precision engineering and manufacturing Vol. 14; no. 3; pp. 381 - 386
Main Author Chen, Der-Chin
Format Journal Article
LanguageEnglish
Published Springer Korean Society for Precision Engineering 01.03.2013
Subjects
Engineering
Industrial and Production Engineering
Materials Science
Aspherical mirror
Effective focal length
Alignment
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Summary:In this paper, a new optical technique involving the five parallel laser beams alignment device and moiré method was developed to rapidly and accurately align the optical axis of three-aspherical mirrors system (TAMS). In this method, the optical axis of a first aspherical mirror is made parallel to the “five incident parallel laser beams” in the plane of incidence. The height and orientation of the first aspherical mirror are fine tuned and the alignment is assured by examining the direction of these five reflected laser beams. The optical axes of second and third aspherical mirror are aligned by five parallel laser beams in accordance with the configuration parameter of optical system in sequence. The effective focal length (EFL) of the TAMS was measured by moiré method and image formula. This novel method is used to align the optical axis of TAMS and the EFL deviation estimated has an accuracy of 1%.
ISSN:2234-7593
2005-4602
DOI:10.1007/s12541-013-0053-7