APA (7th ed.) Citation

Oh, Y., Suh, Y., Son, S., Cho, S., Kang, D., & Cho, I. (2025). A Novel Self-aligned Processing for Doubling the Integration Density of 3D NAND Flash Memory. Journal of semiconductor technology and science, 25(3), 199-205. https://doi.org/10.5573/JSTS.2025.25.3.199

Chicago Style (17th ed.) Citation

Oh, Yun-Jae, Yunejae Suh, So-Won Son, Seongjae Cho, Daewoong Kang, and Il-Hwan Cho. "A Novel Self-aligned Processing for Doubling the Integration Density of 3D NAND Flash Memory." Journal of Semiconductor Technology and Science 25, no. 3 (2025): 199-205. https://doi.org/10.5573/JSTS.2025.25.3.199.

MLA (9th ed.) Citation

Oh, Yun-Jae, et al. "A Novel Self-aligned Processing for Doubling the Integration Density of 3D NAND Flash Memory." Journal of Semiconductor Technology and Science, vol. 25, no. 3, 2025, pp. 199-205, https://doi.org/10.5573/JSTS.2025.25.3.199.