Liquid Injection MOCVD of Zirconium Dioxide Using a Novel Mixed Ligand Zirconium Precursor

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Published inChemical vapor deposition Vol. 4; no. 5; pp. 197 - 201
Main Authors Jones, Anthony C., Leedham, Timothy J., Wright, Peter J., Crosbie, Michael J., Williams, Dennis J., Fleeting, Kirsty A., Davies, Hywel O., Otway, David J., O′Brien, Paul
Format Journal Article
LanguageEnglish
Published 01.10.1998
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Summary:Abstract only
ISSN:0948-1907
1521-3862
DOI:10.1002/(SICI)1521-3862(199810)04:05<197::AID-CVDE197>3.3.CO;2-U