Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 77; no. 2; pp. 106 - 112
Main Authors Dubois, Marc-Alexandre, Muralt, Paul
Format Journal Article
LanguageEnglish
Published 01.10.1999
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ISSN:0924-4247
DOI:10.1016/S0924-4247(99)00070-9