Measurements of charging in capacitive microelectromechanical switches
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Published in | Electronics letters Vol. 38; no. 24; p. 1544 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
21.11.2002
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Online Access | Get full text |
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ISSN: | 0013-5194 |
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DOI: | 10.1049/el:20021071 |