Epitaxial L10 FePt films on SrTiO3 (100) by sputtering

• Published in: Journal of crystal growth Vol. 276; no. 1-2; pp. 111 - 115
• Main Authors: DING, Y. F, CHEN, J. S, LIU, E
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier 15.03.2005
• Subjects: Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Ultrathin films; Temperature dependence; Inorganic compounds; Magnetization; 68.55.Jk A1. SrTiO3 substrate; Platinum alloys; Magnetic hysteresis; Iron alloys; Crystal growth from vapors; XRD; Experimental study; Preferred orientation; Thin films; Binary alloys; Magnetrons; Cathode sputtering; A3. Epitaxial growth; Superlattices; Ordering; A2. Magnetron sputtering; B1. L10 FePt film; Transition element alloys
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2004.10.154

FePt magnetic thin films (20 nm) were deposited on SrTiO3 (1 0 0) single-crystal substrates at 150, 250, and 350 DGC by DC magnetron sputtering. The dependence of the structural and magnetic properties of the FePt films on the substrate temperature was studied. At 150 DGC, the FePt film showed a (1 1 1) preferred orientation. At 250 DGC, the superlattice FePt (001) peak appeared indicating that the ordering process had occurred. At 350DGC, the FePt film illustrated a (0 0 1) preferred orientation. The epitaxial relationship between FePt film and SrTiO3 substrate was demonstrated to be FePt (0 0 1) < 1 0 0 > parallel to SrTiO3 (1 0 0) < 1 0 0 > with high resolution X-ray diffraction (XRD). The L10 ordered FePt film sputtered at 350 DGC showed a well-controlled easy-axis distribution (the degree of the FePt (0 0 1) preferred orientation was indirectly characterized by the full-width at half-maximum of the FePt (2 0 2) rocking curve ~ 0.9DG) as well as a high Ku value (~ 1.56 x 107 erg/cm3).