LIGA technology for the synthesis of diffractive refractive intraocular lenses

The manufacturing of test diffractive refractive intraocular lenses is illustrated by means of LIGA (deep X-ray LIthography and GAlvanoplastics and polymer forming). Dynamic X-ray lithography used while rotating the substrate versus an X-ray mask fixed in a beam of synchrotron radiation (SR) yields...

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Published inBulletin of the Russian Academy of Sciences. Physics Vol. 77; no. 2; pp. 111 - 115
Main Authors Reznikova, E. F., Goldenberg, B. G., Kondratyev, V. I., Kulipanov, G. N., Korolkov, V. P., Nasyrov, R. K.
Format Journal Article
LanguageEnglish
Published Heidelberg Allerton Press, Inc 01.02.2013
Springer Nature B.V
Subjects
Chemical synthesis
Gold
Hadrons
Heavy Ions
Intraocular lenses
Lithography
Nuclear Physics
Physics
Physics and Astronomy
Polymerization
Polymethyl methacrylate
Synchrotron radiation
X-rays
PMMA Layer
Organic Glass
PMMA
Angle Function
Synchro Tron Radiation
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Summary:The manufacturing of test diffractive refractive intraocular lenses is illustrated by means of LIGA (deep X-ray LIthography and GAlvanoplastics and polymer forming). Dynamic X-ray lithography used while rotating the substrate versus an X-ray mask fixed in a beam of synchrotron radiation (SR) yields smooth optical 3D surfaces with roughnesses of 10–30 nm rms in polymethylmethacrylate (PMMA) layers. The axisymmetric diffractive refractive profile of a lens is predetermined by the radial angular function of the X-ray mask topology. The quality of the optical surface is reproduced for the nickel master form, which is electroplated onto a gold layer atop the PMMA relief. The optical quality also remains high for replicated lenses synthesized in this manner during silicon polymerization.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873813020299