Methodological aspects of the electron-beam investigation of dielectric target charging

The basic characteristics of dielectric target charging with (2–30)-keV electron beams were investigated using the example of a typical insulator, Al 2 O 3 . A new hypothetical scenario of dielectric charging, based on the reduction of secondary-electron current due to the formation of polarized exc...

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Published inBulletin of the Russian Academy of Sciences. Physics Vol. 74; no. 7; pp. 979 - 987
Main Authors Evstaf’eva, E. N., Plies, E., Rau, E. I., Sennov, R. A., Tatarintsev, A. A., Freinkman, B. G.
Format Journal Article
LanguageEnglish
Published Heidelberg Allerton Press, Inc 01.07.2010
Springer Nature B.V
Subjects
Aluminum oxide
Charging
Dielectrics
Electron beams
Excitons
Hadrons
Heavy Ions
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XVI Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation in Solid States Physics “SEM-2010”
Incident Electron Energy
Secondary Electron Emission
Dielectric Charge
Primary Electron Energy
Irradiate Area
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Summary:The basic characteristics of dielectric target charging with (2–30)-keV electron beams were investigated using the example of a typical insulator, Al 2 O 3 . A new hypothetical scenario of dielectric charging, based on the reduction of secondary-electron current due to the formation of polarized excitons in the positive layer of a charged target, is proposed on the basis of modeling calculations and the experimental data.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873810070191