Performance of W100−xNx diffusion barriers between 〈Si〉 and Cu
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Published in | Applied surface science Vol. 53; pp. 364 - 372 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.11.1991
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Online Access | Get full text |
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ISSN: | 0169-4332 |
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DOI: | 10.1016/0169-4332(91)90287-T |