A Monte Carlo Simulation for the Ion Transport in Glow Discharges with Dusts

O4; We use the Monte Carlo method to simulate theion transport in the rf parallel plate glow discharge with a negative-voltage pulse connected to the electrode. It is found that self-consistent field, dust charge, dust concentration,and dust size influence the energy distribution and the density of...

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Bibliographic Details
Published inCommunications in theoretical physics Vol. 35; no. 2; pp. 213 - 218
Main Authors Ai-Ping, Sun, Wei, Pu, Xiao-Ming, Qiu
Format Journal Article
LanguageEnglish
Published Southwestern Institute of Physics, P.O. Box 432, Chengdu 610041, China 15.02.2001
Subjects
dusts
glow discharge plasma
ion transport
Monte Carlo techniques
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Summary:O4; We use the Monte Carlo method to simulate theion transport in the rf parallel plate glow discharge with a negative-voltage pulse connected to the electrode. It is found that self-consistent field, dust charge, dust concentration,and dust size influence the energy distribution and the density of the ions arriving at the target, and in particular, the latter two make significant influence. As dust concentration or dust size increases, the number of ions arriving at the target reduces greatly.
ISSN:0253-6102
DOI:10.1088/0253-6102/35/2/213