Low-energy ion gun (5-50 eV) for the study of the discharge-surface interactions
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Published in | Journal of physics. D, Applied physics Vol. 9; no. 7; pp. 1149 - 1164 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
1976
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Online Access | Get full text |
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ISSN: | 0022-3727 1361-6463 |
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DOI: | 10.1088/0022-3727/9/7/009 |