W nano-fuzz growth by high-flux He ion irradiation with their energy above 300 eV

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 520; pp. 22 - 28
• Main Authors: Zhang, Yang, Li, Xiaoping, Niu, Chunjie, Cui, Yunqiu, Ni, Weiyuan, Benstetter, Günther, Lei, Guangjiu, Liu, Dongping, Wang, Wenchun
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.06.2022
• Subjects: He ion energy; Sputtering; Surface temperature; W nano-fuzz; Surface temperature; He ion energy; W nano-fuzz; Sputtering
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/j.nimb.2022.04.002

Here experiments are designed to evaluate the effects of >300 eV He+ energy and temperature on the W nano-fuzz growth over W targets. Our measurements show that increasing He+ energy from 300 eV to 750 eV leads to an increase in the W sputtering yield, thus a decrease in the thickness of W fuzz layers. Under the 750 eV He+ irradiation, the growth of W fuzz layers over W targets is not obvious due to the He+ sputtering. The irradiation temperature varying in the range of 1300 K – 1600 K is most suitable for W fuzz growth by high-flux He+ irradiation over W targets. Our analysis indicates that the deposition of sputtered W atoms onto the neighboring W nano-fibers leads to an increase in their diameter, thus affecting the W fuzz growth. When the irradiation temperature varies from 1900 K to 2700 K, the thermodynamic instability of W nano-fibers, which are metastable can be greatly increased, resulting in their shrinkage.