A Hybrid Pneumatic and Piezoelectric 3d Micro Scanner for Cancer Imaging

This paper presents the development of a new MEMS confocal scanner based on pneumatic and piezoelectric actuators. Confocal imaging was carried out by actuating an objective lens in out-of-plane direction (Z-axis) and lateral directions (X- and Y-axes) using a pneumatic actuator and two piezoelectri...

Full description

Saved in:
Bibliographic Details
Published in2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) pp. 1568 - 1571
Main Authors Fan, Ran, Moallemi, Ali, Zhang, Yunshan, Chen, Lei, Zhao, Yuan, Wu, Zhenguo, Nagamune, Ryozo, Chou, Keng, Zeng, Haishan, Chiao, Mu
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2019
Subjects
Confocal microscope
Endoscope
Fiber optical imaging
Imaging
Lenses
Optical fibers
Piezoelectric actuator
Piezoelectric actuators
Pneumatic actuator
Pneumatic actuators
Three-dimensional displays
Online AccessGet full text

Cover

More Information
Summary:This paper presents the development of a new MEMS confocal scanner based on pneumatic and piezoelectric actuators. Confocal imaging was carried out by actuating an objective lens in out-of-plane direction (Z-axis) and lateral directions (X- and Y-axes) using a pneumatic actuator and two piezoelectric actuators, respectively. The novelty is in using hybrid pneumatic and piezoelectric actuators for confocal scanning applications. We demonstrated 3D scanning with a 785 nm laser, and the new confocal system could assist clinicians to accurately identify lesions in the future.
ISSN:2167-0021
DOI:10.1109/TRANSDUCERS.2019.8808579