Growth of epitaxial YSZ films on LiNbO3 substrates

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Bibliographic Details
Published inThin solid films Vol. 400; no. 1-2; pp. 144 - 148
Main Authors RUBI, R, FABREGA, L, SANDIUMENGE, F, FONTCUBERTA, J, ESTOP, E
Format Conference Proceeding Journal Article
LanguageEnglish
Published Lausanne Elsevier Science 03.12.2001
Subjects
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science; rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Structure and morphology; thickness
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Atomic force microscopy
Inorganic compounds
Epitaxial layers
Electro-optical devices
Transition element compounds
Oxides
Stabilized zirconia
Crystal growth from vapors
XRD
Solid-solid interfaces
Experimental study
Thin films
Magnetrons
Zirconium oxides
Heteroepitaxy
Microstructure
Radiofrequency sputtering
Yttrium oxides
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ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(01)01500-0