Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 157; no. 12; p. J419
Main Authors Ashley, G. M., Kirby, P. B., Butler, T. P., Whatmore, R., Luo, J. K.
Format Journal Article
LanguageEnglish
Published 2010
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ISSN:0013-4651
DOI:10.1149/1.3496003