Microstructure and Pattern Size Dependence of Copper Corrosion in Submicron-Scale Features

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 158; no. 5; p. D298
Main Authors Lee, Ui-hyoung, Jeon, Hyoung Jin, Kang, Tak, Sohn, Hun-Joon, Oh, Kyu Hwan, Her, Eun Kyu, Han, Heung Nam, Lee, H. W., Kim, Insoo, Kim, Donggyu, Lee, Sung-Keun, Lee, Hyo-Jong
Format Journal Article
LanguageEnglish
Published 2011
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ISSN:0013-4651
DOI:10.1149/1.3562204