Sheet resistance of LiNbO3 wafers processed in radio-frequency plasma of hydrogen

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Bibliographic Details
Published inCzechoslovak journal of physics Vol. 50; no. S3
Main Authors Turčičová, H., Prachařová, J., Červená, J., Vacík, J.
Format Journal Article
LanguageEnglish
Published 01.01.2000
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ISSN:0011-4626
1572-9486
DOI:10.1007/BF03165930