Increase in the Adsorption Density of Anionic Molecules on Ceria for Defect-Free STI CMP

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 157; no. 1; p. H72
Main Authors Kim, Ye-Hwan, Kim, Sang-Kyun, Park, Jea-Gun, Paik, Ungyu
Format Journal Article
LanguageEnglish
Published 2010
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ISSN:0013-4651
DOI:10.1149/1.3251009