Synthesis of Ultrafine Particles by Reactions in Electrical Discharges and its Application

Corona and silent mode electrical discharges were applied as a means of activation in a CVD reaction. The discharge was formed stably by a high voltage and high frequency a. c. -power supply in an ozonizer-type reactor in an Ar gas atmosphere. Ultrafine SiO2 particles were synthesized by the hydroly...

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Bibliographic Details
Published inFuntai Kogakkaishi Vol. 30; no. 2; pp. 94 - 100
Main Authors SHIOJI, Shuhei, YAMAMOTO, Hideo, TOKAMI, Kenjiro, NOMURA, Tsuyoshi
Format Journal Article
LanguageEnglish
Published The Society of Powder Technology, Japan 1993
Subjects
Ceramic Membrane
Electrical Discharge
Silica Particle
Ultrafine Paricle
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Summary:Corona and silent mode electrical discharges were applied as a means of activation in a CVD reaction. The discharge was formed stably by a high voltage and high frequency a. c. -power supply in an ozonizer-type reactor in an Ar gas atmosphere. Ultrafine SiO2 particles were synthesized by the hydrolysis reaction of silicone tetrachloride in discharges at room temperature and atmospheric pressure. The basic properties of the CVD reaction excited by electrical discharges were experimentally studied. The proposed CVD reaction method was applied to ceramic membrane formation and to the hydrolysis reaction of silicon alkoxide. A ceramic membrane which has a fine pore of about 0.5μm and a large porosity was formed by sintering the deposited particle layer. SiO2 particles which have alkoxylated surfaces were synthesized directly from silicon tetraethoxide.
ISSN:0386-6157
1883-7239
DOI:10.4164/sptj.30.94