Laser processing of LaB6-based thick film resistors
The paper studies the effect of laser processing on the structure and electrophysical properties of LaB 6 -based thick film resistors (TFR). The phases and structure of the composition are investigated. The exposure to micro-and nanosecond pulses, unlike millisecond ones, is shown to insignificantly...
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Published in | Powder metallurgy and metal ceramics Vol. 47; no. 5-6; pp. 330 - 337 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Boston
Springer US
01.05.2008
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | The paper studies the effect of laser processing on the structure and electrophysical properties of LaB
6
-based thick film resistors (TFR). The phases and structure of the composition are investigated. The exposure to micro-and nanosecond pulses, unlike millisecond ones, is shown to insignificantly increase the electrical resistance of the film and to aid in forming more uniform and fine TFR structure. LaB
6
-based TFRs are more resistant to long-term exposure to nanosecond laser radiation than BaB
6
-and (BaB
6
-LaB
6
)-based ones. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1068-1302 1573-9066 |
DOI: | 10.1007/s11106-008-9024-4 |