Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering

The initial growth and microstructure feature of Ag films formation were investigated, which were prepared by using the very-high-frequency（VHF）（60 MHz） magnetron sputtering. Because of the moderate energy and very low flux density of ions impinging on the substrate, the evolutions of initial growth...

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Bibliographic Details
Published inChinese physics B Vol. 26; no. 9; pp. 1 - 6
Main Author 张悦 叶超 王响英 杨培芳 郭佳敏 张苏
Format Journal Article
LanguageEnglish
Published 01.08.2017
Subjects
初期生长
微观结构特征
溅射制备
磁控
离子能量
超高频
银原子团簇
银膜
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Summary:The initial growth and microstructure feature of Ag films formation were investigated, which were prepared by using the very-high-frequency（VHF）（60 MHz） magnetron sputtering. Because of the moderate energy and very low flux density of ions impinging on the substrate, the evolutions of initial growth for Ag films formation were well controlled by varying the sputtering power. It was found that the initial growth of Ag films followed the island（Volmer—Weber, VW） growth mode, but before the island nucleation, the adsorption of Ag nanoparticles and the formation of Ag clusters dominated the growth. Therefore, the whole initial stages of Ag films formation included the adsorption of nanoparticles, the formation of clusters, the nucleation by the nanoparticles and clusters simultaneously, the islands formation, and the coalescence of islands.
Bibliography:The initial growth and microstructure feature of Ag films formation were investigated, which were prepared by using the very-high-frequency（VHF）（60 MHz） magnetron sputtering. Because of the moderate energy and very low flux density of ions impinging on the substrate, the evolutions of initial growth for Ag films formation were well controlled by varying the sputtering power. It was found that the initial growth of Ag films followed the island（Volmer—Weber, VW） growth mode, but before the island nucleation, the adsorption of Ag nanoparticles and the formation of Ag clusters dominated the growth. Therefore, the whole initial stages of Ag films formation included the adsorption of nanoparticles, the formation of clusters, the nucleation by the nanoparticles and clusters simultaneously, the islands formation, and the coalescence of islands.
Ag film initial growth very-high-frequency sputtering
11-5639/O4
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/26/9/095206