Point spread function and coherent line response in optical systems with non-uniform transmission pupils: application to photolithography

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Bibliographic Details
Published inJournal of the European Optical Society. Part A, Pure and applied optics Vol. 4; no. 6; pp. 795 - 810
Main Authors Hild, R, Escalera, J C, Yzuel, M J, Muschall, R
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.11.1995
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ISSN:0963-9659
1361-6617
DOI:10.1088/0963-9659/4/6/009