Property of nitrogenated tetrahedral carbon on magnetic head prepared by filtered cathodic arc deposition
Nitrogenated tetrahedral carbon films were prepared by filtered cathodic arc deposition. Raman spectroscopy analysis shows N incorporation increases the clustering of the sp2 phase, Nanoindentaion shows the hardness reduction caused by N incorporation can be compensated by optimization of C ion ener...
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Published in | Physica status solidi. C Vol. 4; no. 12; pp. 4400 - 4403 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Berlin
WILEY-VCH Verlag
01.12.2007
WILEY‐VCH Verlag |
Subjects | |
Online Access | Get full text |
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Summary: | Nitrogenated tetrahedral carbon films were prepared by filtered cathodic arc deposition. Raman spectroscopy analysis shows N incorporation increases the clustering of the sp2 phase, Nanoindentaion shows the hardness reduction caused by N incorporation can be compensated by optimization of C ion energy in the deposition. Ta‐C:N films shows higher extinction coefficient and less transparency. The good morphology of films implies ta‐C:N overcoat has good coverage on magnetic head. Corrosion experiment reveals ta‐C:N overcoat has better anti‐corrosion performance. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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Bibliography: | ArticleID:PSSC200777146 ark:/67375/WNG-PFP220G2-L istex:F9F1AE7264A38815999248063CC546530D552AC9 ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1862-6351 1610-1634 1610-1642 |
DOI: | 10.1002/pssc.200777146 |