Property of nitrogenated tetrahedral carbon on magnetic head prepared by filtered cathodic arc deposition

• Published in: Physica status solidi. C Vol. 4; no. 12; pp. 4400 - 4403
• Main Authors: Mingchu, Yang, Gonzaga, Leonard, Bo, Liu
• Format: Journal Article
• Language: English
• Published: Berlin WILEY-VCH Verlag 01.12.2007; WILEY‐VCH Verlag
• Subjects: 52.77.Dq; 85.70.Kh
• ISSN: 1862-6351; 1610-1634; 1610-1642
• DOI: 10.1002/pssc.200777146

Nitrogenated tetrahedral carbon films were prepared by filtered cathodic arc deposition. Raman spectroscopy analysis shows N incorporation increases the clustering of the sp2 phase, Nanoindentaion shows the hardness reduction caused by N incorporation can be compensated by optimization of C ion energy in the deposition. Ta‐C:N films shows higher extinction coefficient and less transparency. The good morphology of films implies ta‐C:N overcoat has good coverage on magnetic head. Corrosion experiment reveals ta‐C:N overcoat has better anti‐corrosion performance. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)