Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

• Published in: Opto-Electronic Science Vol. 2; no. 1; p. 220002
• Main Authors: Jiang, Qilin, Chen, Long, Liu, Jukun, Zhang, Yuchan, Zhang, Shian, Feng, Donghai, Jia, Tianqing, Zhou, Peng, Wang, Qian, Sun, Zhenrong, Xu, Hongxing
• Format: Journal Article
• Language: English
• Published: State Key Laboratory of Precision Spectroscopy,School of Physics and Electronic Science,East China Normal University,Shanghai 200062,China%State Key Laboratory of Precision Spectroscopy,School of Physics and Electronic Science,East China Normal University,Shanghai 200062,China 2023; Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China%Huawei Technologies Co,Ltd.,Bantian Longgang District,Shenzhen 518129,China; Editorial Office of Opto-Electronic Journals, Institute of Optics and Electronics, CAS, China
• Subjects: anisotropic electrical conductivity; femtosecond laser direct writing; ito film; periodic surface nanostructures; transparent nanowires; anisotropic electrical conductivity; femtosecond laser direct writing; ITO film; periodic surface nanostructures; transparent nanowires
• ISSN: 2097-0382
• DOI: 10.29026/oes.2023.220002

This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs)in indium tin oxide(ITO)films via femtosecond laser direct writing focused by a cylindrical lens.The regular LIPSSs exhibited good properties as nanowires,with a resistivity almost equal to that of the initial ITO film.By changing the laser fluence,the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of±10％.Furthermore,the average trans-mittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21%to 60%.The regu-lar LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.