Optical in situ characterization of deposit formation under alternate supply of diethylzinc and CO2 at room temperature

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Bibliographic Details
Published inSurface science Vol. 307-309; pp. 1188 - 1192
Main Authors ROSENTAL, A, NIILISK, A
Format Conference Proceeding Journal Article
LanguageEnglish
Published Lausanne Elsevier Science 20.04.1994
Amsterdam
New York, NY
Subjects
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Physics
CVD
Zinc oxides
Inorganic compounds
Reflection spectrum
In situ
Specular reflection
Transition element compounds
Organometallic compounds
Controlled atmospheres
Experimental study
Fabrication property relation
Film growth
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ISSN:0039-6028
1879-2758
DOI:10.1016/0039-6028(94)91562-8