Formation of Silica Films on Silicon Using Silane and Carbon Dioxide

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 122; no. 4; pp. 573 - 578
Main Authors Kroll, William J., Titus, Russell L., Wagner, J. B.
Format Journal Article
LanguageEnglish
Published 01.01.1975
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2134263