Phenomenological Model of the CVD Epitaxial Reactor
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Published in | Journal of the Electrochemical Society Vol. 129; no. 7; pp. 1627 - 1634 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
01.01.1982
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Online Access | Get full text |
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ISSN: | 0013-4651 1945-7111 |
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DOI: | 10.1149/1.2124222 |