Breakdown of Pulse Discharge in Capacitor Transfer Type Excimer Laser Devices

• Published in: Rēzā kenkyū Vol. 19; no. 12; pp. 1145 - 1152
• Main Authors: SAKURAI, Takeki, TATSUMI, Fujiko, HORI, Hirokazu, INOUE, Yukio
• Format: Journal Article
• Language: English
• Published: Suita The Laser Society of Japan 1991; Laser Society of Japan
• Subjects: Breakdown; Excimer-laser; Ionization; Pulsed-discharge

The breakdown voltage and the breakdown time of pulse discharge in capacitor-transfer type excimer laser devices are measured under various experimental conditions. The experimental results show that the breakdown voltage-time area Sb and the electron drift length l are constant at a fixed gas densi...