Breakdown of Pulse Discharge in Capacitor Transfer Type Excimer Laser Devices

The breakdown voltage and the breakdown time of pulse discharge in capacitor-transfer type excimer laser devices are measured under various experimental conditions. The experimental results show that the breakdown voltage-time area Sb and the electron drift length l are constant at a fixed gas densi...

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Bibliographic Details
Published inRēzā kenkyū Vol. 19; no. 12; pp. 1145 - 1152
Main Authors SAKURAI, Takeki, TATSUMI, Fujiko, HORI, Hirokazu, INOUE, Yukio
Format Journal Article
LanguageEnglish
Published Suita The Laser Society of Japan 1991
Laser Society of Japan
Subjects
Breakdown
Excimer-laser
Ionization
Pulsed-discharge
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Summary:The breakdown voltage and the breakdown time of pulse discharge in capacitor-transfer type excimer laser devices are measured under various experimental conditions. The experimental results show that the breakdown voltage-time area Sb and the electron drift length l are constant at a fixed gas density n and a distance between electrodes d. It is also obtained from the experiments made at different values of n and d that Sb is proportional to n0.4 d and l is proportional to n-0.6. These results are not explained by the breakdown culculated based on a streamer theory by using known data of the first ionization coefficient of gas. When the first ionization coefficient is assumed to be proportional to 1/[d(E/n)/dT], theoretical results are in good agreement with the experimental results and the total ionization number leading the gas breakdown is always nearly constant.
ISSN:0387-0200
1349-6603
DOI:10.2184/lsj.19.12_1145