Large-scale fabrication of thulium iron garnet film with perpendicular magnetic anisotropy using RF magnetron sputtering

Abstract Large-scale fabrication of thulium iron garnet (TmIG) films on gadolinium gallium garnet (GGG) substrates, with a total area of 25 cm 2 , has been demonstrated by rotating substrate holders during on-axis sputtering. By optimizing the growth parameters based on the pressure and flow rate of...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 63; no. 7; pp. 7 - 12
Main Authors Agusutrisno, Marlis N., Obinata, Sora, Okumura, Takamasa, Kamataki, Kunihiro, Itagaki, Naho, Koga, Kazunori, Shiratani, Masaharu, Yamashita, Naoto
Format Journal Article
LanguageEnglish
Published Tokyo IOP Publishing 01.07.2024
Japanese Journal of Applied Physics
Subjects
Annealing
Crystal growth
Crystal lattices
Crystal structure
Gadolinium
Gadolinium-gallium garnet
Iron
Lattice parameters
Magnetic anisotropy
Magnetron sputtering
saturation field enhanced by annealing
Stoichiometry
Substrates
Thulium
Tm/Fe ratio
TmIG film area
TmIG with PMA
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Summary:Abstract Large-scale fabrication of thulium iron garnet (TmIG) films on gadolinium gallium garnet (GGG) substrates, with a total area of 25 cm 2 , has been demonstrated by rotating substrate holders during on-axis sputtering. By optimizing the growth parameters based on the pressure and flow rate of the oxygen ratio, a Tm/Fe ratio of 0.65 was obtained, which is close to the stoichiometry of TmIG. The increase in post-annealing temperature has induced the growth of the TmIG structure by the strain of the lattice constant mechanism. At the highest post-annealing temperature, the crystal structure of TmIG (444) and the perpendicular magnetic anisotropy (PMA) were obtained. This result demonstrates the potential method for large-scale fabrication of TmIG film with PMA.
Bibliography:JJAP-S1104003.R1
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/ad5aff