Sensitivity enhancement of a MEMS sensor in nonlinear regime

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Bibliographic Details
Published inInternational journal of mechanics and materials in design Vol. 12; no. 3; pp. 337 - 351
Main Authors Rezaei Kivi, Araz, Azizi, Saber, Khalkhali, Abolfazl
Format Journal Article
LanguageEnglish
Japanese
Published 01.09.2016
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ISSN1569-1713
1573-8841
DOI10.1007/s10999-015-9310-5

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ISSN:1569-1713
1573-8841
DOI:10.1007/s10999-015-9310-5