Diamond-like Carbon Coating Made by RF Plasma Enhanced Chemical Vapour Deposition for Protective Antireflective Coatings on Germanium

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Bibliographic Details
Published inProcedia materials science Vol. 5; pp. 1015 - 1019
Main Authors Varade, Ashish, Krishna, Ankit, Reddy, K. Niranjan, Chellamalai, M., Shashikumar, P.V.
Format Journal Article
LanguageEnglish
Published 2014
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ISSN:2211-8128
2211-8128
DOI:10.1016/j.mspro.2014.07.390