Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator
An experimental investigation of the saturation ion current densities （Jions） in hydrogen inductively coupled plasma （ICP） produced by a large-power （2-32 kW） radio frequency （RF） generator is reported, then some reasonable explanations are given out. With the increase of RF power, the experimental...
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| Published in | Plasma science & technology Vol. 18; no. 9; pp. 907 - 911 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.09.2016
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| Subjects | |
| Online Access | Get full text |
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| Summary: | An experimental investigation of the saturation ion current densities （Jions） in hydrogen inductively coupled plasma （ICP） produced by a large-power （2-32 kW） radio frequency （RF） generator is reported, then some reasonable explanations are given out. With the increase of RF power, the experimental results show three stages： in the first stage （2-14 kW）, the electron temperature will rise with the increase of RF power in the ICP, thus, the Jions increases continually as the electron temperature rises in the ICP. In the second stage （14 20 kW）, as some H- ions lead to the mutual neutralization （MN）, the slope of Jio~s variation firstly decreases then increases. In the third stage （20-32 kW）, both the electronic detachment （ED） and the associative detachment （AD） in the ICP result in the destruction of H- ions, therefore, the increased amplitude of the Jions in the third stage is weaker than the one in the first stage. In addition, with the equivalent transformer model, we successfully Explain that the Jions at different radial locations in ICP has the same rule. Finally, it is found that the Jions has nothing to do with the outer/inner puffing gas pressure ratio, which is attributed to the high-speed movement of hydrogen molecules. |
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| Bibliography: | An experimental investigation of the saturation ion current densities （Jions） in hydrogen inductively coupled plasma （ICP） produced by a large-power （2-32 kW） radio frequency （RF） generator is reported, then some reasonable explanations are given out. With the increase of RF power, the experimental results show three stages： in the first stage （2-14 kW）, the electron temperature will rise with the increase of RF power in the ICP, thus, the Jions increases continually as the electron temperature rises in the ICP. In the second stage （14 20 kW）, as some H- ions lead to the mutual neutralization （MN）, the slope of Jio~s variation firstly decreases then increases. In the third stage （20-32 kW）, both the electronic detachment （ED） and the associative detachment （AD） in the ICP result in the destruction of H- ions, therefore, the increased amplitude of the Jions in the third stage is weaker than the one in the first stage. In addition, with the equivalent transformer model, we successfully Explain that the Jions at different radial locations in ICP has the same rule. Finally, it is found that the Jions has nothing to do with the outer/inner puffing gas pressure ratio, which is attributed to the high-speed movement of hydrogen molecules. WANG Songbai , LEI Guangjiu , BI Zhenhua , H. GHOMI, YANG Size , LIU Dongping （ 1College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China 2Southwestern Institute of Physics, Chengdu 610041, China 3School of Physics and Materials Engineering, Dalian Nationalities University, Dalian 116600, China 4Laser and Plasma Research Institute, Shahid Beheshti University, Evin, Tehrar, Iran 5School of Physics and Mechanical ＆ Electrical Engineering, Xiamen University, Xiamen 361005, China） 34-1187/TL saturation ion current densities, large-power RF generator, outer/innerpuffing gas pressure ratio, H- ion, transformer model |
| ISSN: | 1009-0630 |
| DOI: | 10.1088/1009-0630/18/9/06 |