Modeling and acoustic microscopy measurements for evaluation of the adhesion between a film and a substrate

A model for calculating the V(z) curve by line-focus acoustic microscopy contains the reflectance function of the specimen as a principal component. In this paper, the reflectance function has been analyzed for various film/substrate systems with a non-perfect interface between the film and the subs...

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Bibliographic Details
Published inThin solid films Vol. 394; no. 1; pp. 188 - 200
Main Authors Guo, Zhiqi, Achenbach, J.D., Madan, Anita, Martin, Keith, Graham, M.E.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.08.2001
Subjects
Adheres
Coatings
Elastic properties
Multilayers
Multilayers
Adheres
Elastic properties
Coatings
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Summary:A model for calculating the V(z) curve by line-focus acoustic microscopy contains the reflectance function of the specimen as a principal component. In this paper, the reflectance function has been analyzed for various film/substrate systems with a non-perfect interface between the film and the substrate. A theoretical study has been carried out to investigate the effect of a non-perfect interface on the propagation of surface acoustic waves (SAW) and its implications for measurements by line-focus acoustic microscopy (LFAM). An experimental study has been performed to verify the theoretical predictions, and to explore the potential of LFAM at high frequencies for non-destructive quantitative evaluation of the bond quality between a film and a substrate. A number of film specimens with different interface conditions between the film and the substrate have been investigated. The stiffness parameters of a non-perfect interface have been determined by the combined use of the V(z) model and LFAM based measurements. The results have been compared with results obtained by other techniques.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(01)01168-3