3-axes MEMS Hall-effect sensor

A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.

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Bibliographic Details
Published in2011 IEEE Sensors Applications Symposium pp. 141 - 144
Main Authors Wei Cai, Chan, Jeremy, Garmire, D
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.02.2011
Subjects
Bonding
Fasteners
Hall effect
Magnetic field measurement
Magnetic flux
MEMS
Micromechanical devices
PolyMUMPs
Wire
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Abstract A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
AbstractList A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
Author Wei Cai
Chan, Jeremy
Garmire, D
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  surname: Wei Cai
  fullname: Wei Cai
  email: weicai@hawaii.edu
  organization: Dept. of Electr. Eng., Univ. of Hawaii at Manoa, Honolulu, HI, USA
– sequence: 2
  givenname: Jeremy
  surname: Chan
  fullname: Chan, Jeremy
  email: jeremych@hawaii.edu
  organization: Dept. of Electr. Eng., Univ. of Hawaii at Manoa, Honolulu, HI, USA
– sequence: 3
  givenname: D
  surname: Garmire
  fullname: Garmire, D
  email: garmire@hawaii.edu
  organization: Dept. of Electr. Eng., Univ. of Hawaii at Manoa, Honolulu, HI, USA
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Snippet A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this...
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StartPage 141
SubjectTerms Bonding
Fasteners
Hall effect
Magnetic field measurement
Magnetic flux
MEMS
Micromechanical devices
PolyMUMPs
Wire
Title 3-axes MEMS Hall-effect sensor
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