3-axes MEMS Hall-effect sensor
A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
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Published in | 2011 IEEE Sensors Applications Symposium pp. 141 - 144 |
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Main Authors | , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.02.2011
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Subjects | |
Online Access | Get full text |
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Summary: | A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter. |
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ISBN: | 1424480639 9781424480630 |
DOI: | 10.1109/SAS.2011.5739801 |