3-axes MEMS Hall-effect sensor

A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.

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Bibliographic Details
Published in2011 IEEE Sensors Applications Symposium pp. 141 - 144
Main Authors Wei Cai, Chan, Jeremy, Garmire, D
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.02.2011
Subjects
Bonding
Fasteners
Hall effect
Magnetic field measurement
Magnetic flux
MEMS
Micromechanical devices
PolyMUMPs
Wire
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Summary:A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
ISBN:1424480639
9781424480630
DOI:10.1109/SAS.2011.5739801