A pressure sensor based on a nitride membrane using single-crystalline piezoresistors

The realization of a piezoresistive pressure sensor, applying a process that combines the advantages of silicon nitride membranes with those of monocrystalline silicon transducers, is presented. This technology, which leads to small devices, low spread in sensor performance and moderate process cost...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 54; no. 1; pp. 488 - 492
Main Authors Folkmer, Bernd, Steiner, Peter, Lang, Walter
Format Journal Article
LanguageEnglish
Published Elsevier B.V 1996
Subjects
Piezoresistors
Pressure sensors
Silicon nitride
Pressure sensors
Piezoresistors
Silicon nitride
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Summary:The realization of a piezoresistive pressure sensor, applying a process that combines the advantages of silicon nitride membranes with those of monocrystalline silicon transducers, is presented. This technology, which leads to small devices, low spread in sensor performance and moderate process cost, can be utilized for mechanical transducers, e.g., pressure sensors, accelerometers, etc., as well as for thermal sensor devices. The design, technology and characterization of a 500 mbar pressure sensor are described.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(97)80009-X