An Inexpensive Diffusion Furnace

The paper describes the design of a low cost diffusion furnace suitable for monolythic circuit manufacture in educational and other establishments, where throughput is small. Features include maximum temperature of 1300℃, direct reading set temperature dial, flat zone 55 mm and an idle temperature o...

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Bibliographic Details
Published inActive and passive electronic components Vol. 9; no. 3; pp. 217 - 222
Main Authors Haskard, M. R., Bannigan, J.
Format Journal Article
LanguageEnglish
Published Wiley 01.01.1982
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Summary:The paper describes the design of a low cost diffusion furnace suitable for monolythic circuit manufacture in educational and other establishments, where throughput is small. Features include maximum temperature of 1300℃, direct reading set temperature dial, flat zone 55 mm and an idle temperature of 420℃ when the furnace is not in use. Four such furnaces have been in operation at the School of Electronic Engineering, South Australian Institute of Technology, each for a twelve month period and have given trouble free operation.
ISSN:0882-7516
1563-5031
DOI:10.1155/APEC.9.217