Numerical analysis of X-ray multilayer Fresnel zone plates with high aspect ratios

A partition calculation method (PCM) for calculating the diffraction efficiency of multilayer Fresnel zone plate with high aspect ratio is proposed. In contrast to the traditional theory, PCM designs and evaluates Fresnel zone plate (FZP) considering material pairs, all zone widths, thicknesses and...

Full description

Saved in:
Bibliographic Details
Published inLaser and particle beams Vol. 42
Main Authors Zhang, Lingyun, Gao, Yazeng, Ming, Shuaiqiang, Lu, Weier, Xia, Yang
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 03.09.2024
Subjects
Approximation
Diffraction efficiency
Energy
Fresnel zones
High aspect ratio
Light
Microscopy
Multilayers
Numerical analysis
Thickness
Wave diffraction
X ray imagery
X ray microscopy
X-rays
Zone plates
atomic layer deposition
coupled wave theory
multilayer Fresnel zones plates
numerical analysis
X-ray optics
diffraction efficiency
high aspect ratio
Online AccessGet full text

Cover

More Information
Summary:A partition calculation method (PCM) for calculating the diffraction efficiency of multilayer Fresnel zone plate with high aspect ratio is proposed. In contrast to the traditional theory, PCM designs and evaluates Fresnel zone plate (FZP) considering material pairs, all zone widths, thicknesses and X-ray energy more completely. The results obtained through PCM are validated by comparing them with the complex amplitude superposition theory and coupled wave theory numerical results. The PCM satisfies the requirements of the theoretical investigation of FZP with small outermost zone width (drN) and large thickness (t). Combining proper numerical analysis with the experimental conditions will present a great potential to break through the imaging performance of X-ray microscopy.
ISSN:0263-0346
1469-803X
DOI:10.1017/lpb.2024.3