A computer-aided design system for microelectromechanical systems (MEMCAD)

• Published in: Journal of microelectromechanical systems Vol. 1; no. 1; pp. 3 - 13
• Main Authors: Senturia, S.D., Harris, R.M., Johnson, B.P., Kim, S., Nabors, K., Shulman, M.A., White, J.K.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.03.1992; Institute of Electrical and Electronics Engineers
• Subjects: Applied sciences; Computer industry; Design automation; Electronic equipment and fabrication. Passive components, printed wiring boards, connectics; Electronics; Exact sciences and technology; Fabrication; Integrated circuit technology; Jacobian matrices; Laboratories; Microelectromechanical systems; Micromechanical devices; Power engineering computing; Process design; System architecture; Electromechanical device; Software package; Spatial structure; System performance; Numerical data; Database; Computer; Microstructure; Simulator; Computer aided design; Calculating time; Structural analysis
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/84.128049

The authors describe the MIT microelectromechanical computer-aided design system (MEMCAD), in which selected commercial software packages are linked with specialized database and numerical programs to allow designers to quickly perform both mechanical and electrical analyses of structures either described directly, or derived from the design specification (mask data plus process flow). The system architecture, the various modules, and their present status are described, and present system performance is demonstrated with several examples.< >