Laser microfabrication of thin films: Part one

In this paper, the first of a series of three reviewing the subject of laser microchemical processing — a potentially powerful technique for the fabrication of a variety of micro and opto-electronics devices — a general introduction to the principle of operation is given and some mainly thermal aspe...

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Bibliographic Details
Published inOptics and laser technology Vol. 18; no. 6; pp. 313 - 317
Main Authors Micheli, F., Boyd, I.W.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 1986
Subjects
laser processing
lasers
opto-electronic devices
thin films
lasers
opto-electronic devices
laser processing
thin films
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ISSN0030-3992
1879-2545
DOI10.1016/0030-3992(86)90057-5

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Summary:In this paper, the first of a series of three reviewing the subject of laser microchemical processing — a potentially powerful technique for the fabrication of a variety of micro and opto-electronics devices — a general introduction to the principle of operation is given and some mainly thermal aspects of film growth are described, for example laser annealing, oxidation, nitridation and evaporation.
ISSN:0030-3992
1879-2545
DOI:10.1016/0030-3992(86)90057-5