Influence of stoechiometry and hydrogen bonding on the insulating properties of PECVD silicon nitride
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Published in | Physica B + C Vol. 129; no. 1; pp. 215 - 219 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
1985
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Online Access | Get full text |
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ISSN: | 0378-4363 |
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DOI: | 10.1016/0378-4363(85)90572-8 |