Laser microfabrication of thin films: Part two
In this paper, the second of a series of three reviewing the subject of laser microchemical processing — a potentially powerful technique for the fabrication of a variety of micro and opto-electronics devices — the main mechanisms of laser-induced deposition of thin films are described. Many example...
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| Published in | Optics and laser technology Vol. 19; no. 1; pp. 19 - 25 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier Ltd
1987
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| Subjects | |
| Online Access | Get full text |
| ISSN | 0030-3992 1879-2545 |
| DOI | 10.1016/0030-3992(87)90006-5 |
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| Abstract | In this paper, the second of a series of three reviewing the subject of laser microchemical processing — a potentially powerful technique for the fabrication of a variety of micro and opto-electronics devices — the main mechanisms of laser-induced deposition of thin films are described. Many examples of photolytic and pyrolytic deposition of insulating, conducting and semiconducting materials, from either gas or liquid phase are given. |
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| AbstractList | In this paper, the second of a series of three reviewing the subject of laser microchemical processing — a potentially powerful technique for the fabrication of a variety of micro and opto-electronics devices — the main mechanisms of laser-induced deposition of thin films are described. Many examples of photolytic and pyrolytic deposition of insulating, conducting and semiconducting materials, from either gas or liquid phase are given. |
| Author | Micheli, F. Boyd, I.W. |
| Author_xml | – sequence: 1 givenname: F. surname: Micheli fullname: Micheli, F. – sequence: 2 givenname: I.W. surname: Boyd fullname: Boyd, I.W. |
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| CitedBy_id | crossref_primary_10_3724_j_issn_1000_0518_1996_2_1821 crossref_primary_10_1016_0022_3093_90_90214_7 crossref_primary_10_1063_1_456129 crossref_primary_10_1063_1_100648 crossref_primary_10_1063_1_341476 crossref_primary_10_3724_j_issn_1000_0518_1996_2_18 crossref_primary_10_1016_0040_6090_92_90907_S |
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| Keywords | lasers opto-electronic devices laser deposition laser processing thin films |
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| SubjectTerms | laser deposition laser processing lasers opto-electronic devices thin films |
| Title | Laser microfabrication of thin films: Part two |
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