The infrared absorption of antimony-doped SiO2 films chemically vapour deposited in the TEOS-SbCl5-O2 system at low temperature
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Published in | Journal of materials science letters Vol. 10; no. 15; pp. 920 - 921 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Dordrecht
Kluwer Academic Publishers
1991
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Subjects | |
Online Access | Get full text |
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ISSN: | 0261-8028 1573-4811 |
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DOI: | 10.1007/BF00724782 |