Photoresist spin coating mechanism related to polymer solution rheology
This study examines the influence of the macromolecular characteristics on the PMMA spin coating both experimentally and from a phenomenological point of view. It is concluded that the weight average molecular weight of the spun on solution is a pertinent paremeter, and that chain entanglements in p...
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Published in | Microelectronic engineering Vol. 6; no. 1; pp. 427 - 431 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
1987
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Online Access | Get full text |
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Summary: | This study examines the influence of the macromolecular characteristics on the PMMA spin coating both experimentally and from a phenomenological point of view. It is concluded that the weight average molecular weight of the spun on solution is a pertinent paremeter, and that chain entanglements in polymer solutions may be considered as the basic phenomenon responsible for the formation of the solid polymer layer. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/0167-9317(87)90069-4 |